TCAD for Si, SiGe and GaAs integrated circuits
G. A. Armstrong, C. K. Maiti,
Published the Institution of Engineering and Technology, London, United Kingdom

Optoelectronic Devices: Advanced Simulation and Analysis
Piprek, Jochim (ed.)
Springer Verlag, New York, 2005
ISBN: 0-387-22659-1

Silicon Processing for the VLSI Era Vol. 1 - Process Technology
Stanley Wolf & R.N. Tauber 910 pp.
2nd edition (c) 2000
ISBN: 0-9616721-6-1

Silicon Processing for the VLSI Era Vol. 2 - Process Integration
Stanley Wolf (c) 1990 752pp
ISBN: 0-9616721-4-5

Silicon Processing fo rthe VLSI Era Vol. 3 - The Submicron MOSFET
Stanley Wolf (c) 2002 726pp
ISBN: 0-9616721-5-3

Silicon Processing for the VLSI Era Vol. 4 - Deep Submicron Process Technology
Stanley Wolf (c)2002 826pp
ISBN: 0-9616721-7-X

Silicon VLSI Technology
James D. Plummer, Michael D.Deal, Peter B.Griffin
ISBN 0-13-085037-3

Silicon VLSI Technology - Fundamentals, Practice and Modeling
James D. Plummer, Michael D. Deal, and Peter B. Griffin